PIEZOELECTRIC SCANNER Russian patent published in 2003 - IPC

FIELD: nanotechnology; devices affording microdisplacement in three coordinates. SUBSTANCE: piezoelectric scanner has set of n equal-diameter piezotubes with parallel butt-ends and solid electrodes on outer and inner surfaces coaxially interconnected at n - 1 butt-end by means of junction members and connected to first and second bases at free butt-ends; at least one piezotube whose outer diameter is smaller than inner diameter of n piezotubes, with four separated electrodes on outer surface and four ones on inner surface; at least one piezotube whose outer diameter is smaller than inner diameter of n piezotubes with electrodes on outer and inner surfaces; elongating member. One butt-end of piezotube with separated electrodes is connected to second base. Piezotube having electrodes on its inner and outer surfaces is connected through its first free end by means of junction member to free end of piezotube having separated electrodes and through second one, to elongating member. The latter is made of material whose specific mass is lower and modulus of elasticity is higher than those of piezoceramics of piezotubes. EFFECT: enlarged functional capabilities. 4 cl, 5 dwg