DEVICE FOR SAMPLE SHIFT Russian patent published in 2009 - IPC G02B21/26 H01L41/00 B81B5/00 

Abstract RU 2377620 C2

FIELD: nanotechnologies.

SUBSTANCE: invention is related to the field of nanotechnology and is aimed at provision of sample shift in three coordinates (X, Y, Z), in particular for shifting of samples, sample holders and other elements in scanning probing microscopy. The second carriage with sample holders is installed by means of the second guides in the first carriage. At least one additional piezoelectric drive is introduced into device. All piezoelectric drives are coupled to body by their first ends, and their ends are fixed to the first carriage by means of hinged joints, and represent the first guides. The second carriage is installed on the first carriage with the possibility of removal from it.

EFFECT: invention has expanded functional resources due to the possibility to research samples with large dimensions and weight, and also provides for fast replacement of samples with their rigid fixation to carriage, precision repeatability of position of carriage with sample, which is provided by the fact that device of sample shift comprises body, on which the first carriage is installed with the second guides by means of the first guides, the first and second piezoelectric drives coupled to the first carriage are fixed.

5 cl, 9 dwg

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RU 2 377 620 C2

Authors

Poltoratskij Ehduard Alekseevich

Redchenko Vladimir Viktorovich

Sokolov Dmitrij Jur'Evich

Dates

2009-12-27Published

2005-12-29Filed