FIELD: scanning probing microscopy.
SUBSTANCE: proposed piezoscanner has base that mounts piezotube with through slots disposed along center line of piezotube to form four fragments. Each piezotube fragment carries main electrodes. Internal electrodes are disposed opposite external ones. Holder for part under inspection is installed on opposite end of piezotube base. Sawtooth voltages are applied to electrodes. They are subjected to C-shaped bending. Then scanning is effected.
EFFECT: extended scanning range, enlarged functional capabilities of proposed piezoscanner and method.
14 cl, 22 dwg
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