METHOD FOR APPLYING CONDUCTIVE TRANSPARENT COVER Russian patent published in 2004 - IPC

Abstract RU 2241065 C2

FIELD: optics.

SUBSTANCE: method includes reactive magnetron dispersion and precipitation of metallic indium with admixture of tin in atmosphere of gas mixture of inert gas and oxygen, while precipitation is performed with ratio of applied components in target: indium - 95%, tin - 5% and with relation of partial pressures of oxygen and argon in gas mixture 1:6. During reactive magnetron dispersion thickness of cover is controlled by spectrophotometer until reaching maximum pass-through in needed length of light wave.

EFFECT: higher quality.

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RU 2 241 065 C2

Authors

Borodin A.N.

Petrov A.S.

Dates

2004-11-27Published

2003-01-27Filed