FIELD: optics.
SUBSTANCE: method includes reactive magnetron dispersion and precipitation of metallic indium with admixture of tin in atmosphere of gas mixture of inert gas and oxygen, while precipitation is performed with ratio of applied components in target: indium - 95%, tin - 5% and with relation of partial pressures of oxygen and argon in gas mixture 1:6. During reactive magnetron dispersion thickness of cover is controlled by spectrophotometer until reaching maximum pass-through in needed length of light wave.
EFFECT: higher quality.
1 ex
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Authors
Dates
2004-11-27—Published
2003-01-27—Filed