FIELD: production of transparent electrodes and electrical heating elements. SUBSTANCE: indium metal with addition of tin is subjected to reactive magnetron sputtering, followed by deposition in atmosphere created by mixture of inert gas and oxygen. Simultaneously, deposition process is subjected to ionic stimulation. Coatings may be applied onto surfaces without pre-heating and it reduces time for coating application. EFFECT: higher efficiency.
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Authors
Dates
1998-05-27—Published
1997-05-22—Filed