METHOD OF APPLYING TRANSPARENT ELECTROCONDUCTIVE COATING WITH CONTROLLED DISTRIBUTION OF THICKNESS ON NON-CONDUCTIVE SUBSTRATE Russian patent published in 2025 - IPC C23C14/06 C23C14/35 C23C14/54 

FIELD: chemistry.

SUBSTANCE: invention relates to a method of producing a transparent electroconductive coating in form of a coating of zinc oxide ZnO, or zinc oxide with an admixture of aluminium AZO, or indium-tin oxide ITO with a variable thickness gradient along two coordinate axes on a substrate by magnetron sputtering. A substrate made of silicate glass is placed on an electrically insulated frame under a floating potential in a vacuum chamber. Vacuuming is carried out, the substrate is heated to temperature of 200-450 °C, supply of gas mixture to vacuum chamber to create working pressure in it from 1⋅10^-2 to 1 Pa and magnetron sputtering of the target onto the substrate to obtain said coating. Said magnetron sputtering is carried out using first a main magnetron in the form of a planar magnetron or a cylindrical magnetron having an electrically insulated anode with a positive potential not exceeding 100 V, and then at least one correcting device in the form of a magnetron to provide a coating thickness gradient applied by a planar or cylindrical magnetron, or in the form of an ion source for local etching of the coating applied by a planar or cylindrical magnetron.

EFFECT: obtaining a thickness gradient over two coordinate axes of a transparent electroconductive material on the surface of the substrate and, as a result, variable over two coordinate axes of specific surface resistance.

1 cl, 12 dwg, 4 ex