METHOD OF PRODUCTION OF A CURRENT-CONDUCTING ALLOYED DIAMOND-LIKE NANO-COMPOSITE FILM Russian patent published in 2004 - IPC

FIELD: production of materials for microelectronics.

SUBSTANCE: the invention presents a method of production of a current-conducting alloyed diamond-like nano-composite film and is pertinent to the field of production of materials for microelectronics. The methods provides for production of a film containing C, Si, O, H as the basic elements and alloyed by molybdenum, pass through the film of an alternating current as a pulse train, expos the film to an electrothermal action using different outside power supplies at different parts of the N-shaped voltage-current characteristic measured during a test- training and with a current periodic switching-off after each measured value of an amplitude of the current, ensuring cooling of the film up to the temperature below 400°С. The produced film has a thermostable microscopic structure, high mechanical strength, and the method ensures its low percent of rejects.

EFFECT: the invention allows to produce a film with a thermostable microscopic structure, high mechanical strength and lower percentage of rejects.

5 cl, 5 dwg