FIELD: manufacturing technology.
SUBSTANCE: invention can be used to create a functional element of a semiconductor element. Essence of the invention lies in the fact that the functional element of the semiconductor instrument has a base made of a crystalline silicon plate, on which a coating layer is formed in the form of a nanofilm of carbon with a crystal lattice of a diamond type, in a silicon plate under nanofilm there is formed a layer having a nanoporous structure, wherein the said nanofilm is monocrystalline.
EFFECT: obtaining nanocrystalline material with high-quality diamond type crystal structure.
1 cl, 5 dwg
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