SCANNING PROBE NANOTOMOGRAPH WITH OPTICAL ANALYSIS MODULE Russian patent published in 2018 - IPC G01Q30/20 B82Y35/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the field of probe measurements of objects after their micro- and nanotoming. Essence of the invention lies in the fact that a scanning probe nanotomograph with an optical analysis module containing a base 1 on which a piezo scanner unit 2 is mounted, probe assembly 10 and the punch assembly 20 are introduced with a sixth drive 37 mounted on the base 1 on which the optical analysis module 30 is fixed, comprising a lens 31 and an analyzer 32 optically conjugated to each other, the sixth drive 37 moves the optical analysis module 30 along the third coordinate Z with the possibility of changing the angle with respect to the optical axis.

EFFECT: technical result consists in providing the possibility of optical observations and research of objects in the process of their cutting, which expands the functionality of the device.

5 cl, 4 dwg