FIELD: nano-engineering; manufacture of nano-structures; methods of production of nano-fibers.
SUBSTANCE: proposed method consists in forming multi-layer structure on substrate; multi-layer structure includes at least one sacrificial layer and film structure from agent used for forming the fibers and divided into narrow strips; sacrificial layer is selectively removed and narrow strips are released from substrate, thus forming fibers. Multi-layer structure may include several sacrificial layers and several layers from which fibers will be formed. Film structure is divided into strips after growing or it is initially divided into narrow strips by forming it on special-pattern substrate. Proposed method makes it possible to obtain nano-fibers possessing high strength and resistance to surrounding medium. Process is compatible with standard technologies of manufacture of integrated circuits.
EFFECT: enhanced efficiency.
10 cl, 4 dwg
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