MAGNETIC FIELD SENSOR AND METHOD OF ITS MANUFACTURING Russian patent published in 2014 - IPC H01L43/06 B82B1/00 

FIELD: measurement equipment.

SUBSTANCE: invention may be used to create miniature sensors for triaxial magnetometry. The magnetic field sensor comprises sensor units implemented using the Hall effect, which are made within a curvilinear shell with a system of layers. The system of layers includes functional and shaping layers that perceive the magnetic field. The latter provide for curvature of the shell and the possibility of orientation of cross-shaped Hall elements of sensor units in the space with arrangement of compliance between measured Hall voltages and orthogonal components of the external magnetic field vector. The method to manufacture a magnetic field sensor consists in the following. A multilayer film element/elements are formed on the substrate. At the same time they use materials, geometry and internal mechanical stresses providing for orientation of cross-shaped Hall elements of sensor units in the space, when there is compliance between the measured Hall voltages and orthogonal components of the external magnetic field vector. At the stage of formation of the film element they manufacture layers, shaping, mechanically stressed and functional, which perceive the magnetic field, with Hall contacts. The film element is separated from the substrate, transforming it under action of internal mechanical stresses into a shell with achievement of orientation of cross-shaped Hall elements in the space, when there is compliance between measured Hall voltages and orthogonal components of the external magnetic field vector.

EFFECT: solutions provide for achievement of accuracy and reliability of simultaneous measurements of orthogonal components of magnetic field, and also a component of magnetic field vector that is different from the one perpendicular to the sensor plane; increased reliability of a sensor and reproducibility of sensor parameters.

24 cl, 6 dwg, 5 ex