FIELD: electrical engineering.
SUBSTANCE: film flat components comprising form-building and functional graphene layers are first fabricated. Note here that said flat film elements are formed on substrate with required spatial arrangement over substrate area, primarily, regular arrangement. Then said flat film elements are separated from substrate and transformed into emitters with preset 3D spatial configuration. Transformation is performed by mechanical internal strains introduced into form-building layers either in producing film flat elements or in transformation, or in their separation and transformation in emitters.
EFFECT: uniform emission of electrons over emitters range, required electron emission density, its controllability, scalability of emitter sizes, optimised emitter outline shape and controlled emission current of every emitter.
16 cl, 9 dwg, 7 ex
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