FIELD: ion neutralizers.
SUBSTANCE: proposed high-frequency electron source has discharge space with at least one ionized gas outlet hole and at least one electron extraction hole 16. Discharge space is at least partially enclosed by first electrode and second electrode, high-frequency electric field being applied between electrodes. High-frequency electron source is provided, in addition, with pair of auxiliary electrodes, dc voltage being applied between these electrodes in effective area of high-frequency field. Proposed high-frequency electron source has no electron emitter, therefore it does not want warm-up period, nor has it complex high-cost parts that need protection against oxygen and moisture.
EFFECT: reduced cost and power requirement.
14 cl, 2 dwg
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