DIAMOND BASE ULTRAVIOLET-RANGE PHOTOVOLTAIC DETECTOR Russian patent published in 2006 - IPC H01L31/18 

Abstract RU 2270494 C2

FIELD: semiconductor microphotoelectronics.

SUBSTANCE: proposed method for manufacturing photodetector depending for its operation on accumulation of charge in potential wells includes production of diamond substrate in the form of wafer and deposition of metal contacts thereon. Diamond wafers chosen for substrate has nitrogen concentration not over 2 · 1019 cm-3. Some of these contacts are placed at substrate potential and are common for external circuit, and potential wells are made under other contacts for accumulating supports of charge divided at metal-to-semiconductor barrier by maintaining "floating" potential across these contacts relative to substrate. Proposed photodetector is characterized in reduced probability of detecting signal from false source ranging between hundreds of nm and 50 nm with sensitivity threshold brought to physical one at λmax = 220 nm.

EFFECT: reduced band of ultraviolet radiation detected by device.

1 cl, 2 dwg

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RU 2 270 494 C2

Authors

Altukhov Andrej Aleksandrovich

Gavrilov Vadim Viktorovich

Eremin Vladimir Viktorovich

Kireev Viktor Andreevich

Mitenkin Anatolij Valerianovich

Mironenko Irina Aleksandrovna

Shustrov Aleksandr Viktorovich

Dates

2006-02-20Published

2003-07-31Filed