METHOD FOR MANUFACTURING A TWO-SPECTRUM PHOTOSENSITIVE ELEMENT BASED ON A SCHOTTKY BARRIER Russian patent published in 2023 - IPC H01L29/872 

FIELD: dual-spectrum photosensitive devices.

SUBSTANCE: method is used to manufacture dual-spectrum photosensitive devices designed for independent registration of radiation in the near ultraviolet (UV) and mid-infrared (IR) ranges of the spectrum. A method for manufacturing a two-spectrum photosensitive element based on a Schottky barrier includes deposition of AuGe on the reverse side of the substrate, fast thermal annealing, deposition of Ti-Au on the reverse side of the substrate, deposition of barrier Au on the epitaxial layer, etching of barrier Au using mesa technology, formation of a mask photoresist for "explosion", "explosion" of Au with photoresist, while after the Ti-Au deposition operation, the following operations are carried out: formation of a photoresist mask on the reverse side of the substrate for Au-Ti-AuGe etching to the substrate, deposition of barrier Au on the reverse side of the substrate, etching of barrier Au using mesa technology.

EFFECT: manufacturing dual-spectrum photosensitive devices.

1 cl, 1 dwg