SPECTRAL ANALYSIS METHOD Russian patent published in 2006 - IPC G01N21/74 

FIELD: measuring equipment engineering.

SUBSTANCE: method for spectral analysis of elements including dosage of probe in electro-thermal tubular atomizer, pyrolysis and atomization of sample, injection of resulting steams into analytical zone for registration of signal by methods of absorption, emission, photo-ionization or mass-spectrometry. Sample is evaporated by heating atomizer, and resulting steams are directed by flow of protective gas from atomizer, portion of steams of determined elements outputted from atomizer necessary for analysis is fractionally condensed on probe, made with possible movement, determined elements are separated from matrix steams, probe with elements precipitated thereon is inserted into analytical zone, heat, elements are evaporated and analytical signals are registered.

EFFECT: decreased energy consumption and duration of measuring cycle of microelectronic gas-sensitive element.

1 dwg