FIELD: measuring equipment.
SUBSTANCE: invention relates to a measurement technique, and more specifically to scanning probe microscopes, adapted to measure the surface of a sample obtained after a mechanical modification of this surface. Essence of the invention is in the fact that the scanning probe microscope combined with the sample surface modifying device contains supports module 46 mounted on base 1 and adapted for mounting movable carriage 26 on it, wherein third drive 31 has the ability to open the interface with movable carriage 26.
EFFECT: technical result of the invention consists in improving the quality of cut sample 40 and, accordingly, reducing the error in measuring the surface of sample 40.
5 cl, 2 dwg
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