METHOD FOR MEASURING SURFACE OF OBJECT IN SCANNING PROBE MICROSCOPE MODE Russian patent published in 2016 - IPC G01Q30/20 G01Q10/00 

FIELD: measuring equipment.

SUBSTANCE: method for measuring surface of object in scanning probe microscope mode relates to measurement equipment, and can be applied to study of structures of samples, for example biomaterials and articles for medical purposes. Method involves preparation of surface 10 of object 9 by means of its cutting due to relative movement along third coordinate Z of object 9 and blade 3 with edge 4, located along second coordinate Y. Approximation is performed of probe 13 to surface 10 of object 9 along first coordinate X, relative scanning is performed of probe 13 and surface 10 of object 9 in plane of second coordinate Y and third coordinate Z, and measuring is performed of surface 10 of object 9 by drafting map surface 10 of object 9. Preparation of surface 10 of object 9 therein is completed with periodic movements of surface 10 of object 9 relative to blade 3.

EFFECT: technical result consists in improvement of quality of object surface preparation to measurement, and also higher quality of probe measurements by reducing effect of irregularities on cut surface of object onto measurement process.

12 cl, 1 dwg