MULTI-CONTACT PROBE FOR TESTING PLANAR ELEMENTS OF INTEGRATION CIRCUITS Russian patent published in 2007 - IPC G01R1/67 

FIELD: electronics, namely, devices for testing planar elements of integration circuits on semiconductor plates.

SUBSTANCE: multi-contact probe for testing planar elements of integration circuits contains body with lid, dielectric plate positioned therein with micro-strip metallic conductors on it, which on one end of dielectric plate are connected to means of communication with testing equipment, and on another end of dielectric plate a device for contacting contact areas of planar elements of integration circuits is present. Device for contacting contact areas of planar elements of integration circuits is made in form of detachable block, representing a system of flat resilient metallic strip conductors of comb type, one ends of which are held in transverse plate of dielectric and contact is realized with micro-strip metallic conductors on dielectric plate, while other ends of flat resilient metallic strip conductors realize contact with contact areas of planar elements of integration circuits, while transverse plate of dielectric is made with thickness exceeding 1/3 of its length.

EFFECT: increased precision and lifetime of multi-contact probe for testing planar elements of integration circuits and possible restoration of serviceability thereof.

4 cl, 1 dwg