PROBE FOR MEASURING ELECTRIC PARAMETERS OF PLANAR ELEMENTS OF INTEGRATED CIRCUIT Russian patent published in 2006 - IPC G01R1/67 

FIELD: measuring technique.

SUBSTANCE: probe has coaxial joint, coaxial transmission line, air coplanar transmission line made of elastic conductors. Conductors of air coplanar transmission line have protrusions for making contact with contact areas of planar elements of integrated circuits. Slots are made at ends of coaxial transmission line's conductors. Conductors of air transmission line are fixed inside slots by means of current-conducting glue. Dielectric bushing is placed in area of slots at end of coaxial transmission line. Layer, absorbing microwave radiation, is applied onto surface of coaxial transmission line.

EFFECT: simplified technique of manufacture of probe; better reproducibility of electric parameters of probe; improved reliability and service life of probe.

3 cl, 1 dwg