FIELD: nano technology, in particular, devices, providing information about condition of surface with usage of scanning probe microscopy.
SUBSTANCE: probe sensor based on quartz resonator for scanning probe microscope contains platform with quartz resonator and base held on it, fastened serially on platform are flat piezo-ceramic plate with first and second electrodes, isolator and screen, and also a holder, while quartz resonator by electric outputs is held in holder with possible disconnection from it and force interaction of base and screen.
EFFECT: increased resolution of device, expanded functional capabilities.
9 cl, 7 dwg
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|---|---|---|---|
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