POWER PROBE MADE ON THE BASE OF QUARTZ CRYSTAL VIBRATOR Russian patent published in 2005 - IPC

FIELD: device providing receiving of information on condition of object's surface.

SUBSTANCE: device can be used for inspecting surfaces of objects at tunnel and atomic-power modes of operation in scanning probe microscope. Power probe for scanning probe microscope has quartz crystal vibrator provided with needle fixed at surface of one arm of quartz vibrator due to chemical bond between needle and surface. There are variants of the device where thread-shaped crystals are used as needles and nanotubes. Thread-shaped crystals can be made of carbon, metal, semiconductor and isolator. Needles can be also fixed at external surface of arm of quartz vibrator as well as its edge and side surfaces. Needles can be arranges as in parallel to axis of symmetry of quartz vibrator and in perpendicular to its axis. According to one more variant, needle can be fixed at random angle to axis of plane of one arm of quartz vibrator. In some cases surface of arm of quartz vibrator can used for fixing several needles of different lengths.

EFFECT: improved sensitivity of probe; widened operational capabilities.

12 cl, 6 dwg