FIELD: physics; measurement.
SUBSTANCE: present invention relates to nanotechnology and scanning probe microscope. The resonance device, based on a quartz resonator for a scanning probe microscope, contains a holder for the quartz resonator, a quartz resonator with two arms, with electrical terminals and a needle attached to it, piezo scanner, sample holder, a system for coarse movement of the quartz resonator with the needle to the sample and piezo plate, joined to the holder of the quartz resonator. The device is provided with a base, and the quartz resonator is fixed on the holder behind the base element, consisting of a base and electrical terminals. Also between the holder of the quartz resonator and the piezo plate, there is a filler plate, and the needle is glued to the quartz resonator on two points. The first point is on the arm and the second is on its base.
EFFECT: increased sensitivity of the device and more functional capabilities.
5 cl, 11 dwg
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|
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