SCANNING MICROSCOPE PROBE Russian patent published in 2019 - IPC G01Q60/24 B82Y35/00 G01Q70/02 

FIELD: instrument engineering.

SUBSTANCE: invention relates to scanning probe microscopy, namely to devices providing obtaining information on topology and other properties of surface of object, for studying surface of bodies by atomic force microscopy and nanotechnology. Scanning microscope probe consists of needle 1 and console 2 fixed in holder 4. Needle 1 is made in form of single-layer carbon nanotube, on free end of console 2 there is hole 3 for free passage of needle 1 through it, on both sides of which there are free ends of a pair of elastic elements of clamp 5 installed on cantilever 2, and a pair of elastic elements of gripper 6 located above elements of clamp 5. On the side of holder 4 pairs of elements of clamp 5 and gripper 6 are rigidly fixed to each other and fixed on holder 4, forming a single electrical conductor, and their surfaces are coated with layer 7 of dielectric material. In addition, probe comprises source 8 of needle position control signals 1, electric inputs of which are connected to needle 1 by pairs of resilient elements of clamp 5 and gripper 6.

EFFECT: high accuracy and reliability of a scanning microscope probe.

1 cl, 3 dwg