FIELD: physics.
SUBSTANCE: scanning probe microscope which is combined with a device for modifying the surface of an object includes a platform on which there is a die with a first actuator and a specimen moving mechanism with a second actuator, a scanning device, a measuring probe with a holder and a control unit. The scanning device is mounted on the specimen moving mechanism, and the specimen is attached to the scanning device.
EFFECT: increased resolution of the device.
18 cl, 8 dwg
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