CONTROL UNIT FOR SCANNING PROBE MICROSCOPES Russian patent published in 2011 - IPC G01Q30/04 B82B3/00 

FIELD: physics.

SUBSTANCE: control unit for scanning probe microscopes, having a vibrating probe sensor, a vertical drive for mutual displacement of the sensor and the sample perpendicular to the scanning plane, and a measuring transducer for signals from the vibrating probe sensor, has a first feedback circuit which includes a digital signal processor which connects the output of the measuring transducer of signals from the vibrating probe signal and the vertical drive, a programmable gate array which is programmed to perform direct digital synthesis of a variable signal with a first frequency, a USB unit for connection with a computer, apparatus for processing the signal from the measuring transducer for signals from the vibrating probe sensor using a twin phase synchronous mixer and the signal with first frequency and low-frequency filters. The twin phase synchronous mixer is self-contained and analogue with subsequent digitisation. Low frequency filtration is digital and is performed using the digital signal processor. An electrical isolation unit inserted before the USB unit.

EFFECT: high accuracy of tracking topography.

4 cl, 3 dwg