FIELD: electronic technology.
SUBSTANCE: invention relates to the field of electronic technology and can be used in the manufacture of products of light-indicating equipment and emission electronics based on field emission of multi-pointed carbon structures. Synthesis of the multi-pointed field emission cathode material is carried out in a plasma of microwave gas discharge from vapors of carbon-containing substances, for example ethanol, in the range of process parameters, in which transition from deposition of graphite to deposition of diamond films is realized. Composite material of field radiating cathode, which is a graphite matrix with inclusions of nanodiamond crystallites, is deposited on thin dielectric layers with low conductivity and high dielectric permeability, for example, diamond films.
EFFECT: reduced thresholds of field-emission emission, high density of field-emission current and degradation resistance of multi-pointed film cathodes.
1 cl, 1 dwg
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Authors
Dates
2019-06-24—Published
2018-03-12—Filed