FIELD: electricity.
SUBSTANCE: synthesis of a material of a multi-spike field-emission cathode is carried out in a plasma of a microwave gas discharge from vapours of carbon-containing substances, for instance, ethanol, in the range of process parameters, in which a transition is realised from deposition of graphite films to deposition of diamond films. The produced composite material represents a graphite matrix with inclusions of nanodiamond crystallites. The matrix of the multi-spike field-emission diode is manufactured in accordance with the technology compatible with the technology of integrated circuits production.
EFFECT: higher mechanical and electric strength, density of field-emission currents and degradation resistance when operating with higher voltages.
2 dwg
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