FIELD: storing vessel for melt silicon, method for making it.
SUBSTANCE: method for making vessel for receiving melt silicon or for melting silicon comprises steps of depositing material in the form of silicon composite cermet containing metallic silicon, silicon nitride and silicon oxide onto inner wall of vessel. Deposited coating has next relation of metallic silicon (X) to silicon nitride (Y) and to silicon oxide (Z): X : Y : Z = (20 - 50)- (77 - 30): (3 -20).
EFFECT: improved efficiency method for producing melt silicon bath storing vessel which does not contaminate melt silicon, features very good sintering capability, high mechanical strength.
7 cl, 1 dwg, 3 ex, 2 tbl
Authors
Dates
2007-07-27—Published
2002-12-06—Filed