CURRENT COLLECTOR SYSTEM Russian patent published in 2007 - IPC C23C16/46 

FIELD: semiconductor electronics; methods of production of the current collector systems.

SUBSTANCE: the invention is pertaining to the current collector system used for the device, which has been made with the capability of handling of the substrates and-or the slices. The current collector system has the cavity (1), which servers as the chamber for handling the substrates and-or the slices and which is passing in the longitudinal direction and is limited by the upper wall (2), the lower wall (3), the right-hand lateral wall (4), and the left-hand lateral wall (5). The upper wall (2) is formed by at least one detail made out of the electrically conducting material suitable for heating by means of the electromagnetic induction. The lower wall (3) is formed at least by one detail made out of the electrically conducting material suitable for heating by means of the electromagnetic induction. The right-hand lateral wall (4) is formed at least by one detail made out of the inert reflective and electrically insulating material, the left-hand lateral wall(5) is made at least by one detail made out of the inert reflective and electrically insulating material. Each detail of the upper wall (2) is electrically well insulated from each detail of the lower wall (3). The technical result of the invention consists in provision of the uniform heating of the chamber, that allows to produce the qualitative coatings, and also consists in the simplification of the design of the current collector system and the device for handling of the substrates and-or the slices.

EFFECT: the invention ensures the uniform heating of the chamber allowing to produce the qualitative coatings, simplification of the designs of the current collector system and the device for handling of the substrates and-or the slices.

21 cl, 5 dwg