FIELD: electric current collector system to apparatus for working substrates and (or) plates.
SUBSTANCE: current collector system includes working chamber restricted at least by two walls and at least by one heating electromagnet. System includes at least one current collecting member restricted by outer surface and made of electrically conducting material suitable for heating by electromagnetic induction. Current collecting member is hollow one. First part of outer surface of current collecting member is suitable for forming wall of working chamber. Second part of outer surface of current collecting member is suitable for arranging near heating electromagnet.
EFFECT: enhanced uniformity of working chamber heating.
25 cl, 6 dwg
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Authors
Dates
2007-09-10—Published
2002-12-10—Filed