PUMPING DEVICE IMPLYING USE OF NON-EVAPORATING GETTER AND METHODS FOR USING SAID GETTER Russian patent published in 2002 - IPC

FIELD: superhigh vacuum producers. SUBSTANCE: pumping device uses non- evaporating getter for creating superhigh vacuum inside chamber whose inner metal surface is covered with thin layer of non-evaporating gas- absorbing getter deposited in vacuum by cathode spraying. Method for producing thin layer of non-evaporating getter includes following sequential steps: thin layer of non-evaporating getter is applied by cathode spraying to at least small area of chamber wall surface; chamber is joined with vacuum system; vacuum is built up by means of vacuum system; the latter is dried out at preset temperature at the same time maintaining temperature within chamber below activation temperature of non-evaporating getter; vacuum system drying is ceased while temperature within chamber is raised to activation temperature and this temperature is maintained within predetermined time to allow for making non-evaporating getter clean, whereupon temperature is reduced to ambient value. EFFECT: enhanced efficiency of pumping device. 5 cl