FIELD: magnetron reactive spraying of nitride, carbide and carbonitride coatings. SUBSTANCE: device for magnetron reactive spraying of nitride, carbide and carbonitride coatings has cathode, target secured to cathode by means of holder, magnetic system and hollow anode connected with gas supply system. Ring nozzle is made on the anode end face remote from the target for starting the working gas mixture with guides parallel to anode side generating line. Located between anode and target holder surface is insulating cylindrical bushing. Magnetic system is located on the nonworking side of the target. Anode is cylindrical in shape and its near edge on the side of insulating bush has cylindrical recess. Anode hollow is communicated with ring nozzle by means of screw passages. EFFECT: higher efficiency. 1 dwg
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Authors
Dates
1996-08-20—Published
1993-11-12—Filed