FIELD: chemical industry; methods of production of the multilayer coatings out of the.
SUBSTANCE: the invention presents the multilayer coatings out of the non-evaporating getter, produced by the cathode deposition, and the methods of their manufacture. The multilayer coating out of the non-evaporating getter materials contains at least two layers on the substrate. The first coat deposited directly on the substrate consists from non-evaporating getter material having the surface area equivalent at least to 20-fold value of its geometrical area. Located on the first layer at least one more (second) layer with the thick of no more than 1 micron consists from non-evaporating getter alloy with the low temperature of activation. The deposited layers are produced by the cathode deposition. The invention also presents the method of manufacture of the indicated above multilayer coating. The technical result of the invention creation of the getter material possessing the high absorption indexes at the room temperature.
EFFECT: the invention ensures production of the getter material possessing the high absorption indexes at the room temperature.
18 cl, 5 dwg, 6 ex
