FIELD: investigating or analyzing of materials.
SUBSTANCE: method comprises focusing laser radiation on the material to be analyzed, producing laser plasma of the material, exciting the plasma with electronic beam, recording the spectrum of radiation of the plasma, and analyzing the composition of the materials. Before generating the laser plasma, the material is irradiated by electromagnetic waves or electronic beam for exciting fluorescence. The intensity of the laser beam is less than the threshold of evaporation of the material from the surface. The spectra of reflection and fluorescence are recorded and analyzed, and the molecular composition of the material is determined.
EFFECT: enhanced precision of analysis.
1 dwg
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