FIELD: measuring equipment engineering.
SUBSTANCE: method includes focusing laser emission on analyzed substance, production of laser plasma of substance, excitation of this plasma with following registration of spectrum of emission of this plasma and analysis of element composition of device. Laser plasma of substance is excited by electronic beam, length of laser emission pulse is 15 nanoseconds, while electrons accelerator is utilized with energy 100-200 keV, pulse length 5 nanoseconds, and synchronization system for enabling laser, accelerator and spectrum analyzer.
EFFECT: improved sensitivity and analysis precision.
1 dwg
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