APPARATUS FOR APPLYING COATINGS ON SURFACES OF PARTS Russian patent published in 2016 - IPC C23C14/56 C23C14/35 H01J37/34 H01J37/317 

FIELD: metal processing.

SUBSTANCE: invention relates to an apparatus for applying coatings on surfaces of parts. Inside the housing of the vacuum chamber there is at least one source of sprayed material, made in the form of N magnetrons, where N is an integer number and N > 1, and an ion source. Inside the housing chamber there is a protective capsule, and in the center of the chamber there is a high-voltage source of bias voltage and low-voltage source of bias voltage. Carousel and part holder are located inside the upper part of the protective capsule. Parts are located inside the protective capsule bottom. Magnetrons and ion source are installed along the perimeter of the protective capsule. Upper part of the protective capsule is made with upper blind end and fixed on hollow shaft, which is installed in the upper part of the housing chamber and is rigidly connected to the carousel shaft in electrically insulated assembly of top part of protective capsule. Lower part of protective capsule has bottom blind end and fixed on shaft, which is installed in the lower part of the housing of the vacuum chamber and is connected with drive of reciprocal motion by coupling. Axis of rotation of the upper and lower parts of the protective capsule, shaft of top part of the protective capsule, shaft of lower part of the protective capsule, rod, electrically insulated assembly, electrically insulated fitting assembly coincide with the axis of rotation of the carousel. Outer side of the vacuum chamber housing, containing a system of gas supply, has a multi-position electric switch, configured to switch the high-voltage and low-voltage sources of bias voltage from the carousel shaft onto the shaft of the upper part of the protective capsule and shaft of the lower part of the protective capsule.

EFFECT: higher quality of coatings due to protection surface of parts from defects.

1 cl, 1 dwg