FIELD: invention refers to microscopy namely to the method of receiving an image and may be used for observation over biological objects, micro- or nano-structures and also for control of quality of micro-lithography.
SUBSTANCE: in the mode for receiving the image of increased resolution consisting in observation of the investigated object under an optical microscope of far field in accordance with the invention they put particles on the investigated object or place it in liquid having suspension of particles and with the aid of the particles which turn out to be in immediate proximity from the surface of the sample in the sphere of the nearest field they receive information about distribution of intensity of the nearest field over this surface by observing the particles through the optical microscope, at that they define the value of scattering or absorption corresponding to each separate particle and the coordinate of this particle, on the received image of the point with increased resolution with the coordinate of each particle they attribute the value of scattered and absorbed intensity. In quality of particle they use micro- or nano particles.
EFFECT: increase speed of receiving images and also cost reduction and simplification of the process.
12 cl, 9 dwg
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Authors
Dates
2008-03-20—Published
2006-04-07—Filed