PROBE OF NEUTRAL MICROSCOPE Russian patent published in 2018 - IPC G01Q60/18 B82Y35/00 G01Q70/10 

FIELD: microscopes.

SUBSTANCE: invention relates to scanning probe microscopy and can be used in studying microrelief of reflecting surfaces, for example, in crystallography, metrology, in study of high molecular compounds, etc. Probe of near-field microscope is made in form of segment of beam waveguide with pointed conical tip with at least two electrically conducting elements applied to outer surfaces of cone with dielectric gap between them. At cone apex, between electroconductive elements in the area of arrangement of nonradiative electromagnetic modes, optical matching tool is placed. Tool for optical matching can be made in form of quantum dots with resonant frequency equal to frequency of electromagnetic wave introduced into fiber, or in form of integrated-optical resonator with resonant frequency equal to frequency of electromagnetic wave introduced into beam waveguide.

EFFECT: increase in spatial resolution.

3 cl, 2 dwg