FIELD: chemistry.
SUBSTANCE: industrial silicon with industrial methanol react in the presence of a catalyst at high temperature. From the products of the reaction, hydrogen-containing methoxysilane in a mixture with tetramethoxysilane is separated. Monosilane is obtained through catalyst disproportioning of hydrogen-containing methoxysilanes, and cleaned through adsorption on active carbon. Temperature fall between the stages of separating hydrogen-containing methoxysilanes and subsequent catalyst disproportioning does not decrease by less than 60°C. Purifying monosilane from carbon-containing impurities is done through throttle discharge of monosilane from high pressure of 60 kg/cm2 to low pressure of 1-3 kg/cm2, providing for lowering temperature of gaseous monosilane with impurities to temperature not higher than minus 10°C and formation of a dispersed phase of tetramethoxysilane. Through hydrolysis of tetramethoxysilane, silicon dioxide is obtained, which is reduced to silicon and returned to the stage of direct synthesis of trimethoxysilane.
EFFECT: lower content of carbon-containing impurities in monosilane and low consumption of raw materials and energy.
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Authors
Dates
2008-07-20—Published
2006-10-06—Filed