METALLISATION OF BASE (BASES) BY METHOD OF DEPOSITING FROM STEAM-AND-LIQUID PHASE Russian patent published in 2008 - IPC C23C16/52 C23C16/06 C23C16/44 

FIELD: technological processes.

SUBSTANCE: invention is related to metal coatings that are applied by means of chemical-thermal deposition from steam phase, and also to products and methods. Metal-containing precursor is transported in transport medium via chamber to base at temperature in transport volume that is less than temperature of metal-containing precursor decomposition. Deposition of metal layer onto base is carried out by means of decomposition of metal-containing precursor on base. Temperature at base is higher than decomposition temperature of metal-containing precursor. Temperature of base and temperature of metal-containing precursor in transport volume are measured directly. Rate of deposition and quality of mentioned metal layer on specified base is controlled by means of regulation of specified base temperature and temperature of metal-containing precursor in transport volume with application of transport mediums that are saturated with precursor. Temperature is regulated between transport mediums and base and during maintenance of conditions for transport mediums that are at least close to saturation.

EFFECT: improves quality of thin film from deposited material and significantly reduces formation of metal dust.

44 cl, 10 dwg, 2 tbl, 12 ex