METHOD OF COATING DEPOSITION USING DLI-MOCVD WITH REPEATED USE OF PRECURSOR COMPOUND Russian patent published in 2019 - IPC C23C16/18 C23C16/32 C23C16/448 

Abstract RU 2699126 C1

FIELD: chemistry.

SUBSTANCE: invention relates to machining for protection of structural elements operating under severe conditions from wear, corrosion and/or oxidation at high temperature. Disclosed is a method of depositing a protective coating by chemical deposition from a gas phase of an organometallic compound by direct liquid injection (DLI-MOCVD) on a substrate. Protective coating consists of one or more layers, wherein at least one of them is a protective layer of protective material containing transition metal M, selected from at least one of carbide, alloy or metal. Said method involves the following steps: a) placing a mother liquor containing a hydrocarbon solvent which does not contain oxygen atoms into the feed tank, said organometallic compound formed from a bis(arene) type precursor with a decomposition temperature of 300 °C to 600 °C, and containing a transition metal M, and optionally a carbon inclusion inhibitor; b) evaporation of said mother solution in an evaporator, and then its introduction into a reactor for chemical deposition from the gas phase, for deposition of the protective layer on the substrate in the reactor chamber in a medium with a deposition temperature of 300 °C to 600 °C, and reduced deposition pressure; c) collecting through a reactor outlet a fraction of a gaseous effluent, substances contained therein, are formed in standard conditions corresponding to atmospheric pressure and temperature of 25 °C, secondary solution, and d) pouring the obtained secondary solution into a feed tank to obtain a new mother solution for use at step a).

EFFECT: reduced or eliminated use, formation and emission of environmentally hazardous substances, minimizing industrial constraints and energy needs, possibility of repeated application of formed and unencumbered compounds at maintaining level of quality and efficiency of coatings obtained using traditional technologies.

29 cl, 8 dwg, 2 tbl, 6 ex

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RU 2 699 126 C1

Authors

Schuster, Frederic

Maury, Francis

Michau, Alexandre

Pons, Michel

Boichot, Raphael

Lomello, Fernando

Dates

2019-09-03Published

2016-12-17Filed