GEAR TO MANUFACTURE CAPACITIVE PRESSURE TRANSDUCERS AND PROCESS OF THEIR ASSEMBLY Russian patent published in 2002 - IPC

FIELD: measurement technology, manufacture of thin-film capacitive pressure transducers. SUBSTANCE: gear for tension of membrane of capacitive pressure transducer has tension unit, holders on two sides, four screws and two plates to anchor material of membrane, two metal plates ( presses ), plates of temperature-resistant rubber and duralumin plates. All these components are designed for compaction of package of transducer under pressure ( 3-4 )x10⁵ Pa/sq cm and for time of holding under following conditions: 30-50 C for 30-50 min: 60-80 C for 30-40 min; 100-150 C for 60-70 min and 300-320 C for 20-30 min. Under normal pressure at 20-30 C package of transducer is held under pressure ( 2-4 )x10⁴ Pa/sq cm in the course of 72 h. Layers in transducer are bonded with the use of thin layer of liquid adhesive based on epoxy resin. EFFECT: increased reliability and quality of manufactured transducer thanks to assembly of it while membrane is tightened. 2 cl, 4 dwg