FIELD: biology.
SUBSTANCE: invention relates to tunnel or atomic-force microscopy and describes method of composite cantilever production for scanning probe microscopy with console made of silicon nitride and by means of silicon pin. Proposed method includes formation of pin bases around service depressions of pin bases connecting silicon pins and silicon nitride consoles simplifying in-service inspection of pin sharpness and widening range of produced items due to cantilevers and pins of any height and shape.
EFFECT: sharp cantilever pin and small angle at pin top and equal shape of pin.
14 dwg
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