CANTILEVER WITH SILICON NEEDLE OF COMPLEX SHAPE Russian patent published in 2021 - IPC G01B7/34 

FIELD: nanotechnology.

SUBSTANCE: invention relates to nanotechnology and scanning probe microscopy, and more specifically to probes (cantilevers) that make it possible, in combination with a probe microscope, to obtain information about the topography of a sample and other physical characteristics of its surface, such as, for example, conductivity, stiffness and chemical composition. The essence of the invention lies in the fact that in a cantilever with a silicon needle containing a base 1, on which a monocrystalline silicon console 2 with a silicon needle 3 is fixed, consisting of a pointed working part 4 and a pedestal 5 having a length-to-cross-dimension ratio of at least two and no more than sixty and located on the plane of the monocrystalline silicon console 2, the single-crystal silicon console 2, the pedestal 5 and the pointed working part 4 are made of a single array monocrystalline silicon.

EFFECT: cantilever with a silicon needle provides a higher resolution when scanning the surface under study, as well as a higher accuracy of the measured physical characteristics of the objects of the surface under study.

21 cl, 19 dwg