THIN-FILM PRESSURE SENSOR Russian patent published in 2009 - IPC G01L9/04 

FIELD: physics, measurement.

SUBSTANCE: thin-film pressure sensor is meant for working in conditions of the action of increase vibratory acceleration. Sensor contains cylindrical case (1), spring element (2) in a form integrated with cylindrical supporting base (3) rigidly fixed membrane (4). On membrane (4) is formed strain-sensitive configuration (5) with resistive-strain sensor (6) and contact pads (7). On case (1) and supporting base (3) is fixed a cylindrical terminal block (8). Contacts (9) blocks (8) are placed perpendicularly to the surface of spring element (2) above contact pads (7), placed on the periphery of spring element (2). Lead-out conductors (10) connect the contact pads (7) and contacts (9), blocks (8) and are partially located on the cylindrical surface, connecting planes of contact pads (7) and planes of contact (9) surfaces. Resistive-strain sensors (6) are placed on the periphery of membrane (4) between contact pads (7). On supporting base (3) spring element (2) is executed cylindrical thinning (11) and protrusion (12) in the form of a cylindrical ring. One of the bases of the ring is located on the plane of membrane (4), on which is placed strain-sensitive configuration (5). Sizes of the spring element (2), terminal block (8) and the case (1) are connected with a specific correlation.

EFFECT: increase in the sensitivity of the sensor to the measured pressure.

1 dwg