METHOD OF PRODUCING A THIN-FILM PRESSURE STRAIN GAUGE Russian patent published in 2012 - IPC G01L9/04 

FIELD: measuring equipment.

SUBSTANCE: method for producing the a thin-film pressure strain gauge includes producing a film with rim base, polishing the surface of the said film, forming tensor elements with low-Ohm conduits and bonding pad between them, and removing residual voltage. Furthermore, the tensor elements are formed with the use of the tensor-sensitive layer template which has a set of tensor elements in areas contacting with the low-Ohm conduits and bonding pads between them, in form of the strips which include images of tensor elements and their continuation in two opposite directions. In bonding pad contact areas the template configuration partially coincides with the bonding pads and areas positioned away from the strips. The strip length and distance between the remote areas and the strips is chosen from the ratios according to the relevant calculation formulae.

EFFECT: measurement error reduction in non-steady temperature and vibration acceleration conditions; manufacturability, stability, working capacity and storageability time increase due to the size reduction of tensor elements, reduced influence of mismatch and low accuracy of teso-sensitive and low-Ohm layers, improved residual voltage removal and film and tenso-circuit stabilisation.

2 cl, 11 dwg