PRESSURE SENSOR WITH VIBRATION-RESISTANT NANO- AND MICRO-ELECTROMECHANICAL SYSTEM Russian patent published in 2011 - IPC G01L9/04 B82B1/00 

FIELD: physics.

SUBSTANCE: pressure sensor with a vibration-resistant nano- and micro-electromechanical system has a cylindrical housing for said system, consisting of an elastic member in form of a membrane on which a thin-film heterogeneous structure is deposited, in which a strain-sensitive circuit with tenso-resistors and contact pads is formed from a cylindrical terminal block and from terminal conductors. Through-holes are made in the contacts of the block. The terminal conductors are partly located in the holes of the terminal block and are attached on contacts while ensuring air-tightness of the joint between contacts of the block and the terminal conductors. The place between walls of the holes in the contacts and the terminal conductors is at least partially filled with high melting point solder. The contact pads of the strain-sensitive circuit are mounted on the supporting base of the elastic member. On the end face of the terminal block facing the strain-sensitive circuit, there is a depression whose dimensions are in a certain ratio.

EFFECT: reduced errors in pressure sensors with nano- and micro-electrochemical systems owing to reduction of the thermoelectric coefficient on connections of the contacts of the terminal block with terminal conductors and wires connecting contacts of the block to a secondary converter.

2 dwg