FIELD: physics, measurement.
SUBSTANCE: invention refers to measurement technology and can be used in instrument and mechanical engineering for angular velocity measurement. Sensitive element contains piezoelectric plate on one side of which are generated at least one converter of the resonator on surface acoustic waves and at least one reflecting structure of the resonator. Within reflecting structures area, there are formed grooves not parallel to reflecting structures. These grooves are crossed with reflecting structures of the resonator. At least on one side from reflecting structures of the resonator, there are formed converters of surface acoustic waves on propagation path of surface acoustic waves generated by converters. Behind driver converters there are reflecting structures of the driver. Working frequencies of the converter of the resonator on surface acoustic waves and the converter of the driver of surface acoustic waves differ from each other. Grooves can have through holes and alternating narrow and widen spots.
EFFECT: higher accuracy of angular velocity measurement.
4 cl, 1 dwg
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Authors
Dates
2009-01-27—Published
2007-05-14—Filed