INERTIAL STEP MOTOR Russian patent published in 2009 - IPC H01L41/09 

FIELD: physics, measurement.

SUBSTANCE: invention is related to devices for mechanical displacement of objects along single coordinate. It may be used, for instance, in scanning probing microscope (SPM) for approaching of probe and sample. Inertial step motor comprises base with fixed piezoelectric modulus combined with rod of square section, where carriage is installed with the possibility of displacement along rod axis, and carriage comprises the first element with the first V-shaped guides and the second element with the second V-shaped guides. At that the first and second V-shaped guides are conjugated with rod of square section and spring-loaded relative to it, and also control unit connected to piezoelectric modulus. The first and second carriage elements are additionally connected by flat springs, which are installed parallel to axis of carriage displacement.

EFFECT: improved stability of displacement step, and higher reliability of device.

6 cl, 4 dwg